Plasma Diagnostics and Applications
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Scope of this subject
This cluster of papers covers a wide range of topics related to plasma physics and its applications in the semiconductor industry, including plasma etching techniques, atomic layer etching, Hall thrusters for spacecraft propulsion, electron energy distribution function measurements, and ion-molecule collisions. It also explores the use of plasmas in electric propulsion for satellites and spacecraft.
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Research vocabulary
electric propulsion; argon plasma; plasma etching; inductively coupled plasma; Hall thruster; electron energy distribution; low-pressure plasma; gas discharge; etch rate; optical emission spectroscopy; ion thrusters; spacecraft propulsion; glow discharge; plasma density; plasma sheath; specific impulse; RF discharge; RF plasma; low-pressure discharge; hydrogen plasma; electron cyclotron resonance plasma; ion energy distribution; plasma discharge; hollow cathode discharge; capacitively coupled plasma
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Numeric address and provenance
Morton address: 36240454085937721 · morton4x16-v1
Coordinates: (3, 22, 2208, 10781). The address interleaves categorical identifier bits. Nearby addresses are not guaranteed to describe semantically similar subjects.
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