{"cited_by_count":1032917,"description":"This cluster of papers covers a wide range of topics related to Microelectromechanical Systems (MEMS), including silicon properties, microfabrication techniques, resonators, actuators, sensors, reliability issues, RF switches, nanomechanical testing, and thermal behavior.","display_name":"Advanced MEMS and NEMS Technologies","domain_id":"3","external_ids":{"openalex":"https://openalex.org/T10369","wikipedia":"https://en.wikipedia.org/wiki/Microelectromechanical_systems"},"field_id":"22","id":"T10369","keywords":[{"display_name":"MEMS","id":"mems","score":0.491,"url":"https://openalex.org/keywords/mems"},{"display_name":"microelectromechanical systems","id":"microelectromechanical-systems","score":0.4811,"url":"https://openalex.org/keywords/microelectromechanical-systems"},{"display_name":"electrostatic actuation","id":"electrostatic-actuation","score":0.6832,"url":"https://openalex.org/keywords/electrostatic-actuation"},{"display_name":"MEMS fabrication","id":"mems-fabrication","score":0.5195,"url":"https://openalex.org/keywords/mems-fabrication"},{"display_name":"surface micromachining","id":"surface-micromachining","score":0.697,"url":"https://openalex.org/keywords/surface-micromachining"},{"display_name":"MEMS resonators","id":"mems-resonators","score":0.599,"url":"https://openalex.org/keywords/mems-resonators"},{"display_name":"MEMS accelerometer","id":"mems-accelerometer","score":0.4136,"url":"https://openalex.org/keywords/mems-accelerometer"},{"display_name":"MEMS gyroscope","id":"mems-gyroscope","score":0.4522,"url":"https://openalex.org/keywords/mems-gyroscope"},{"display_name":"microactuators","id":"microactuators","score":0.386,"url":"https://openalex.org/keywords/microactuators"},{"display_name":"RF MEMS switches","id":"rf-mems-switches","score":0.804,"url":"https://openalex.org/keywords/rf-mems-switches"},{"display_name":"MEMS sensors","id":"mems-sensors","score":0.3299,"url":"https://openalex.org/keywords/mems-sensors"},{"display_name":"silicon micromachining","id":"silicon-micromachining","score":0.4105,"url":"https://openalex.org/keywords/silicon-micromachining"},{"display_name":"nanoelectromechanical systems","id":"nanoelectromechanical-systems","score":0.3336,"url":"https://openalex.org/keywords/nanoelectromechanical-systems"},{"display_name":"MEMS actuators","id":"mems-actuators","score":0.6115,"url":"https://openalex.org/keywords/mems-actuators"},{"display_name":"microcantilever","id":"microcantilever","score":0.4765,"url":"https://openalex.org/keywords/microcantilever"},{"display_name":"MEMS packaging","id":"mems-packaging","score":0.5591,"url":"https://openalex.org/keywords/mems-packaging"},{"display_name":"bulk micromachining","id":"bulk-micromachining","score":0.7179,"url":"https://openalex.org/keywords/bulk-micromachining"},{"display_name":"MEMS switches","id":"mems-switches","score":0.608,"url":"https://openalex.org/keywords/mems-switches"},{"display_name":"pull-in voltage","id":"pull-in-voltage","score":0.7929,"url":"https://openalex.org/keywords/pull-in-voltage"},{"display_name":"electrostatic actuators","id":"electrostatic-actuators","score":0.5827,"url":"https://openalex.org/keywords/electrostatic-actuators"},{"display_name":"RF MEMS","id":"rf-mems","score":0.6849,"url":"https://openalex.org/keywords/rf-mems"},{"display_name":"deep reactive ion etching","id":"deep-reactive-ion-etching","score":0.3676,"url":"https://openalex.org/keywords/deep-reactive-ion-etching"},{"display_name":"MEMS mirror","id":"mems-micromirror","score":0.5283,"url":"https://openalex.org/keywords/mems-micromirror"},{"display_name":"MEMS pressure sensor","id":"mems-pressure-sensor","score":0.6874,"url":"https://openalex.org/keywords/mems-pressure-sensor"},{"display_name":"piezoresistive pressure sensor","id":"piezoresistive-pressure-sensor","score":0.467,"url":"https://openalex.org/keywords/piezoresistive-pressure-sensor"}],"legacy_keywords":["Silicon","MEMS","Microfabrication","Resonators","Actuators","Sensors","Reliability","RF switches","Nanomechanical testing","Thermal behavior"],"openalex_id":"https://openalex.org/T10369","source_created_date":"2024-01-23T15:27:06","source_updated_date":"2026-10-17T03:02:00","subfield_id":"2208","url":"/topics/T10369","works_api_url":"https://api.openalex.org/works?filter=topics.id:T10369","works_count":107039,"label":"Advanced MEMS and NEMS Technologies","provider":"openalex","revision":"f2adc2f9a8234225","taxonomy_revision":"f050b5d4780b1289","title":"Advanced MEMS and NEMS Technologies","kind":"topic-directory","aeo_cohort":"topic-directory","catalogue_revision":"f050b5d4780b1289","numeric_address":"36239906477048377","address_version":"morton4x16-v1","coordinates":[3,22,2208,10369],"answer_status":"Directory metadata; local answer requires separate source review","truth_status":"Subject descriptor, not a factual answer or a demonstrated knowledge gap","reviewed_answer":null}