{"id":"S90002917","label":"Plasma-enhanced chemical vapor deposition","description":"","source_url":"https://id.loc.gov/authorities/subjects/sh90002917","normalized_label":"plasma-enhanced chemical vapor deposition","broader":["http://id.loc.gov/authorities/subjects/sh94001275"],"aliases":["Plasma-enhanced CVD"],"source_identifier":"http://id.loc.gov/authorities/subjects/sh90002917","provider":"lcsh","revision":"eb433b7841dc01b0","taxonomy_revision":"f050b5d4780b1289","title":"Plasma-enhanced chemical vapor deposition","url":"/topics/S90002917","kind":"topic-directory","aeo_cohort":"topic-directory","catalogue_revision":"f050b5d4780b1289","numeric_address":"9533007722623403590","address_version":"morton4x16-v1","coordinates":[0,21,30039,37888],"answer_status":"Directory metadata; local answer requires separate source review","truth_status":"Subject descriptor, not a factual answer or a demonstrated knowledge gap","reviewed_answer":null}