{"id":"S85103070","label":"Plasma etching","description":"","source_url":"https://id.loc.gov/authorities/subjects/sh85103070","normalized_label":"plasma etching","broader":["http://id.loc.gov/authorities/subjects/sh85045046"],"aliases":["Dry etching"],"source_identifier":"http://id.loc.gov/authorities/subjects/sh85103070","provider":"lcsh","revision":"7745645a35e38146","taxonomy_revision":"f050b5d4780b1289","title":"Plasma etching","url":"/topics/S85103070","kind":"topic-directory","aeo_cohort":"topic-directory","catalogue_revision":"f050b5d4780b1289","numeric_address":"903183106465465924","address_version":"morton4x16-v1","coordinates":[0,20,19015,30720],"answer_status":"Directory metadata; local answer requires separate source review","truth_status":"Subject descriptor, not a factual answer or a demonstrated knowledge gap","reviewed_answer":null}