{"id":"S85077608","label":"Lithography, Electron beam","description":"","source_url":"https://id.loc.gov/authorities/subjects/sh85077608","normalized_label":"lithography, electron beam","broader":["http://id.loc.gov/authorities/subjects/sh85042201","http://id.loc.gov/authorities/subjects/sh85084822","http://id.loc.gov/authorities/subjects/sh85101379"],"aliases":["Electron beam lithography"],"source_identifier":"http://id.loc.gov/authorities/subjects/sh85077608","provider":"lcsh","revision":"fca427911d69fd3c","taxonomy_revision":"f050b5d4780b1289","title":"Lithography, Electron beam","url":"/topics/S85077608","kind":"topic-directory","aeo_cohort":"topic-directory","catalogue_revision":"f050b5d4780b1289","numeric_address":"9547701579847975428","address_version":"morton4x16-v1","coordinates":[0,20,18617,40960],"answer_status":"Directory metadata; local answer requires separate source review","truth_status":"Subject descriptor, not a factual answer or a demonstrated knowledge gap","reviewed_answer":null}