{"id":"S2008009220","label":"Immersion lithography","description":"","source_url":"https://id.loc.gov/authorities/subjects/sh2008009220","normalized_label":"immersion lithography","broader":["http://id.loc.gov/authorities/subjects/sh2004005298","http://id.loc.gov/authorities/subjects/sh85084822","http://id.loc.gov/authorities/subjects/sh85084858"],"aliases":["Lithography, Immersion"],"source_identifier":"http://id.loc.gov/authorities/subjects/sh2008009220","provider":"lcsh","revision":"7447857888cb5501","taxonomy_revision":"f050b5d4780b1289","title":"Immersion lithography","url":"/topics/S2008009220","kind":"topic-directory","aeo_cohort":"topic-directory","catalogue_revision":"f050b5d4780b1289","numeric_address":"4633153184670573088","address_version":"morton4x16-v1","coordinates":[0,478,48936,4096],"answer_status":"Directory metadata; local answer requires separate source review","truth_status":"Subject descriptor, not a factual answer or a demonstrated knowledge gap","reviewed_answer":null}